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Anisotropic multi-phase-field solution for crossing grain boundary and morphological evolution of inclusions in (110)-oriented interconnects under electromigration

Yuanzhe Guo and Peizhen Huang

Vol. 21 (2026), No. 2, 107–126
Abstract

Under high current density loading, the crossing grain boundary behavior and the morphological evolution of inclusions in polycrystalline interconnects affect the performance and service life of interconnects. Combined with an adaptive meshing technique and the finite element method, a multi-phase-field model under anisotropic interface diffusion induced by electromigration is developed to analyze the inclusion crossing behavior. The results indicate that increasing the conductivity ratio will suppress the inclusion splitting and hinder its crossing process. Increasing the anisotropy strength will hinder the inclusion crossing process and lead to three distinct drift modes: steady drift, oscillatory drift, and tilted drift. Increasing the electric field strength will accelerate the oscillation process of the inclusion surface. Increasing the misorientation of fast interface diffusion direction concerning the electric field in right-side or left-side grain will change the splitting position, which influences the crossing behavior. This study helps to reveal the different modes of inclusion crossing behavior in interconnects.

Keywords
anisotropic interface diffusion, electromigration, crossing grain boundary, inclusion, conductivity ratio, anisotropic strength, misorientation difference
Milestones
Received: 10 November 2025
Revised: 17 May 2026
Accepted: 25 May 2026
Published: 29 October 2026
Authors
Yuanzhe Guo
State Key Laboratory of Mechanics and Control of Mechanical Structures
Nanjing University of Aeronautics and Astronautics
Nanjing
China
Peizhen Huang
State Key Laboratory of Mechanics and Control of Mechanical Structures
Nanjing University of Aeronautics and Astronautics
Nanjing
China